With the rapid development of nanotechnology, the active vibration isolation electron microscope plays an irreplaceable role in precision research.
Cryo-EM technology rapidly freezes biological samples, then uses TEM for high-resolution imaging. The active vibration isolation electron microscope system uses six-degree-of-freedom compensation to eliminate building sway interference.
Data shows that after installing a quality active isolation system, cryo-EM resolution can be improved by 20%-30%.
FIB systems are usually integrated with SEM. Environmental vibration causes beam deviation. The active vibration isolation electron microscope support platform ensures FIB system stability.
LVH-T15 adopts electromagnetic actuators and four-stage air spring composite technology, achieving 0.5-200Hz full-frequency suppression.

SEM plays an important role in semiconductor inspection. The active vibration isolation electron microscope system achieves 30ms step disturbance suppression.
Systems supporting online modal analysis can monitor vibration modes in real time. LVH-T15 supports online modal analysis.
The active vibration isolation electron microscope technology plays a key role in improving imaging quality.
