|
Model / Parameter
|
TA-400
|
TA-600
|
TA-800
|
|---|---|---|---|
|
Dimensions (L×W×H, mm)
|
400×450×100
|
500×600×100
|
800×600×115
|
|
Effective surface (mm)
|
350×400
|
550×450
|
750×550
|
|
Weight (kg)
|
18
|
27
|
40
|
|
Load capacity (kg)
|
100
|
120
|
220
|
|
Vibration isolation technology
|
Active compensation for vibration interference based on piezoelectric sensors, with fast signal processing and control actuators
|
||
|
Electronic control system
|
Internally integrated MCU controller arrangement
|
||
|
Active vibration isolation direction
|
Active compensation in six degrees of freedom
|
||
|
Active bandwidth
|
1–100 Hz / 200 Hz (6 degrees of freedom)
|
||
|
Response time / Feedback time
|
≤30 ms / 10–20 ms (step disturbance suppression)
|
||
|
Vibration isolation performance
|
>90% attenuation at >5 Hz, >95% attenuation at >10 Hz / >90% at 5 Hz, >95% at 10 Hz
|
||
|
Maximum correction force
|
Vertical: ±12 N; Horizontal: ±8 N
|
||
|
Working height adjustment
|
Automatically adjusts working height based on load weight
|
||
|
Remote control
|
RS232 communication interface for remote control
|
||
|
Load-bearing flatness
|
≤0.05 mm/m² (installation reference plane)
|
||
|
Power characteristics
|
220V±10%, 50W (with standby <15W)
|
||
|
Environmental adaptability
|
5°C–40°C (with temperature compensation function)
|
||
|
Installation requirements
|
Base vibration: Vibration amplitude <5 μm in <500 Hz frequency band
Grounding impedance: <4Ω (independent grounding terminal) Level reference: Installation surface flatness meets Grade 0 marble platform standard |
||
|
Applicable equipment types
|
Quantum sensors, fiber optic gyroscopes
|
Desktop SEM, confocal microscopes
|
Wafer inspection instruments, femtosecond laser systems
|
|
Adaptation scenarios
|
Laboratories with ground vibration RMS >2 μm/s
Cleanrooms requiring ISO Class 5 cleanliness Ultra-precision instruments weighing <50 kg |
||
